Inventor
SAITO HARUMITSU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SAITO HARUMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US6500051B1Dec 31, 2002
Polishing apparatus and method
EBARA CORP25 citations92
US4419330ADec 6, 1983
Thermal reactor of fluidizing bed type
EBARA CORP45 citations92
US5173041ADec 22, 1992
Multistage vacuum pump with interstage solid material collector and cooling coils
EBARA CORP27 citations90
US4452155AJun 5, 1984
Method for incinerating material
EBARA CORP18 citations81