Inventor
MAKAREWICZ STANLEY R
US5 patents
Patents
5 patentsUS4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US4251571AFeb 17, 1981
Method for forming semiconductor structure with improved isolation between two layers of polycrystalline silicon
IBM26 citations81
US4394406AJul 19, 1983
Double polysilicon contact structure and process
IBM18 citations72
US4498095AFeb 5, 1985
Semiconductor structure with improved isolation between two layers of polycrystalline silicon
IBM2 citations61
US4437108AMar 13, 1984
Double polysilicon contact structure
IBM1 citations50