Inventor
MENDEL ERIC
US4 patents
Patents
4 patentsUS4671851AJun 9, 1987
Method for removing protuberances at the surface of a semiconductor wafer using a chem-mech polishing technique
IBM189 citations98
US4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US4435247AMar 6, 1984
Method for polishing titanium carbide
IBM47 citations90
US4579760AApr 1, 1986
Wafer shape and method of making same
IBM11 citations65