Inventor
PATRICK WILLIAM J
US6 patents
Patents
6 patentsUS4954142ASep 4, 1990
Method of chemical-mechanical polishing an electronic component substrate and polishing slurry therefor
IBM330 citations98
US4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US4789648ADec 6, 1988
Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias
IBM526 citations97
US4717596AJan 5, 1988
Method for vacuum vapor deposition with improved mass flow control
IBM138 citations95
US4640221AFeb 3, 1987
Vacuum deposition system with improved mass flow control
IBM113 citations93
US4437922AMar 20, 1984
Method for tailoring oxygen precipitate particle density and distribution silicon wafers
IBM97 citations91