Inventor

PERRY KATHLEEN A

US4 patents

⚠️ This page may combine multiple inventors who share the name “PERRY KATHLEEN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US4944836AJul 31, 1990

Chem-mech polishing method for producing coplanar metal/insulator films on a substrate

IBM539 citations97

US4789648ADec 6, 1988

Method for producing coplanar multi-level metal/insulator films on a substrate and for forming patterned conductive lines simultaneously with stud vias

IBM526 citations97

US5246885ASep 21, 1993

Deposition method for high aspect ratio features using photoablation

IBM70 citations94

KU SAN MEI

1 patent

US5010039AApr 23, 1991

Method of forming contacts to a semiconductor device

KU SAN MEI111 citations92