Inventor
PLISKIN WILLIAM A
US6 patents
Patents
6 patentsUS4944836AJul 31, 1990
Chem-mech polishing method for producing coplanar metal/insulator films on a substrate
IBM539 citations97
US4354309AOct 19, 1982
Method of manufacturing a metal-insulator-semiconductor device utilizing a graded deposition of polycrystalline silicon
IBM63 citations94
US4506435AMar 26, 1985
Method for forming recessed isolated regions
IBM45 citations92
US4492717AJan 8, 1985
Method for forming a planarized integrated circuit
IBM28 citations92
US4249968AFeb 10, 1981
Method of manufacturing a metal-insulator-semiconductor utilizing a multiple stage deposition of polycrystalline layers
IBM43 citations91
US4544576AOct 1, 1985
Deep dielectric isolation by fused glass
IBM24 citations81