Inventor
PAWLAKOWITSCH ANTON
DE5 patents
Patents
5 patentsUS5009738AApr 23, 1991
Apparatus for plasma etching
LEYBOLD AG129 citations95
US4869801ASep 26, 1989
Apparatus for mounting workpieces
LEYBOLD AG75 citations92
US5348313ASep 20, 1994
Radial shaft sealing ring
LEYBOLD AG22 citations90
US5266117ANov 30, 1993
Apparatus for the evaporative coating of substrates
LEYBOLD AG9 citations72
US5228917AJul 20, 1993
Apparatus to reduce the sagging of the outside walls of vacuum tanks
LEYBOLD AG6 citations70