Inventor
RENGARAJAN SURAJ
US19 patents
⚠️ This page may combine multiple inventors who share the name “RENGARAJAN SURAJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS7253109B2Aug 7, 2007
Method of depositing a tantalum nitride/tantalum diffusion barrier layer system
APPLIED MATERIALS INC44 citations96
US6911124B2Jun 28, 2005
Method of depositing a TaN seed layer
APPLIED MATERIALS INC52 citations96
US6346489B1Feb 12, 2002
Precleaning process for metal plug that minimizes damage to low-κ dielectric
APPLIED MATERIALS INC61 citations96
US6207558B1Mar 27, 2001
Barrier applications for aluminum planarization
APPLIED MATERIALS INC77 citations95
US7014887B1Mar 21, 2006
Sequential sputter and reactive precleans of vias and contacts
APPLIED MATERIALS INC26 citations92
US6589890B2Jul 8, 2003
Precleaning process for metal plug that minimizes damage to low-κ dielectric
APPLIED MATERIALS INC32 citations92
US6368880B2Apr 9, 2002
Barrier applications for aluminum planarization
APPLIED MATERIALS INC33 citations92
US6313033B1Nov 6, 2001
Ionized metal plasma Ta, TaNx, W, and WNx liners for gate electrode applications
APPLIED MATERIALS INC33 citations92
US6579730B2Jun 17, 2003
Monitoring process for oxide removal
APPLIED MATERIALS INC27 citations91
US7687909B2Mar 30, 2010
Metal / metal nitride barrier layer for semiconductor device applications
APPLIED MATERIALS INC7 citations74
US10047430B2Aug 14, 2018
Self-ionized and inductively-coupled plasma for sputtering and resputtering
APPLIED MATERIALS INC5 citations73
US6908865B2Jun 21, 2005
Method and apparatus for cleaning substrates
APPLIED MATERIALS INC10 citations71
US12322592B2Jun 3, 2025
Deposition of silicon-based dielectric films
APPLIED MATERIALS INC0 citations62
US6936842B2Aug 30, 2005
Method and apparatus for process monitoring
APPLIED MATERIALS INC4 citations61
US7749361B2Jul 6, 2010
Multi-component doping of copper seed layer
APPLIED MATERIALS INC3 citations59
US12505539B2Dec 23, 2025
Cell body segmentation using machine learning
APPLIED MATERIALS INC0 citations44
US12475555B2Nov 18, 2025
Artificial intelligence-based hyperspectrally resolved detection of anomalous cells
APPLIED MATERIALS INC0 citations41