Inventor
STOLK ROLAND PIETER
NL5 patents
⚠️ This page may combine multiple inventors who share the name “STOLK ROLAND PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS9645510B2May 9, 2017
Method of controlling a radiation source and lithographic apparatus comprising the radiation source
ASML NETHERLANDS BV3 citations68
US11314174B2Apr 26, 2022
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV1 citations60
US7283208B2Oct 16, 2007
Lithographic apparatus, method of manufacturing a device, and device manufactured thereby
ASML NETHERLANDS BV0 citations50
US7433139B2Oct 7, 2008
Variable attenuator for a lithographic apparatus
ASML NETHERLANDS BV1 citations46