Inventor
POSTIGLIONE MARC J
US3 patents
Patents
3 patentsUS7487054B2Feb 3, 2009
Automated dynamic metrology sampling system and method for process control
IBM9 citations78
US7519216B1Apr 14, 2009
Systems and methods of maintaining equipment for manufacturing semiconductor devices
IBM5 citations51
US7881891B2Feb 1, 2011
Automated dynamic metrology sampling system and method for process control
IBM0 citations46