Inventor
TERASAKI HIROKI
JP4 patents
Patents
4 patentsUS5871558AFeb 16, 1999
Process for producing silica glass
HITACHI CHEMICAL CO LTD34 citations88
US7319072B2Jan 15, 2008
Polishing medium for chemical-mechanical polishing, and method of polishing substrate member
HITACHI CHEMICAL CO LTD13 citations82
US7232529B1Jun 19, 2007
Polishing compound for chemimechanical polishing and polishing method
HITACHI CHEMICAL CO LTD14 citations82
US7744666B2Jun 29, 2010
Polishing medium for chemical-mechanical polishing, and method of polishing substrate member
HITACHI CHEMICAL CO LTD4 citations60