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Inventor
HAN MOON-HYEONG
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “HAN MOON-HYEONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
1 patent
US8546270B2
Oct 1, 2013
Atomic layer deposition apparatus
SAMSUNG ELECTRONICS CO LTD
8 citations
82
KIM KI-HYUN
1 patent
US8394201B2
Mar 12, 2013
Atomic layer deposition apparatus
KIM KI-HYUN
13 citations
81