Inventor
NAGAHASHI YOSHITOMO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAGAHASHI YOSHITOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
9 patentsUS7116396B2Oct 3, 2006
Exposure device, exposure method and device manufacturing method
NIKON CORP20 citations92
US6922910B2Aug 2, 2005
Exposure apparatus
NIKON CORP20 citations92
US7643129B2Jan 5, 2010
Exposure apparatus, exposure method, method for manufacturing device
NIKON CORP8 citations83
US7416574B2Aug 26, 2008
Filter apparatus, exposure apparatus, and device-producing method
NIKON CORP13 citations81
US7973906B2Jul 5, 2011
Exposure apparatus, exposure method, method for manufacturing device
NIKON CORP5 citations72
US7948608B2May 24, 2011
Exposure apparatus, exposure method, method for manufacturing device
NIKON CORP3 citations72
US6753942B2Jun 22, 2004
Environmental control chamber
NIKON CORP9 citations72
US6784972B2Aug 31, 2004
Exposure apparatus, device manufacturing method and environmental control method of exposure apparatus
NIKON CORP10 citations68
US9581913B2Feb 28, 2017
Exposure apparatus, exposure method, method for manufacturing device
NIKON CORP1 citations61
NAGAHASHI YOSHITOMO
2 patentsUS8896813B2Nov 25, 2014
Exposure apparatus, exposure method, method for manufacturing device
NAGAHASHI YOSHITOMO0 citations46
US8797502B2Aug 5, 2014
Exposure apparatus, exposure method, and method for producing device with electricity removal device by adding additive to liquid
NAGAHASHI YOSHITOMO0 citations36