Inventor
UNNO YUTAKA
JP29 patents
⚠️ This page may combine multiple inventors who share the name “UNNO YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
27 patentsUS7279661B2Oct 9, 2007
Heating apparatus
NGK INSULATORS LTD53 citations92
US6875960B2Apr 5, 2005
Heating system
NGK INSULATORS LTD28 citations92
US7632356B2Dec 15, 2009
Gas providing member and processing device
NGK INSULATORS LTD18 citations82
US7560668B2Jul 14, 2009
Substrate processing device
NGK INSULATORS LTD8 citations82
US11574822B2Feb 7, 2023
Wafer support table with ceramic substrate including core and surface layer
NGK INSULATORS LTD2 citations71
US11223302B2Jan 11, 2022
Electrostatic chuck having an annular outer region covered by an insulating film
NGK INSULATORS LTD2 citations70
US9123757B2Sep 1, 2015
Heating device and semiconductor manufacturing apparatus
NGK INSULATORS LTD5 citations64
US6958462B2Oct 25, 2005
Ceramic heaters
NGK INSULATORS LTD3 citations63
US11956863B2Apr 9, 2024
Multi-zone heater
NGK INSULATORS LTD1 citations62
US11367631B2Jun 21, 2022
Ceramic heater and manufacturing method for tubular shaft
NGK INSULATORS LTD0 citations62
US10566218B2Feb 18, 2020
Ceramic heater
NGK INSULATORS LTD1 citations62
US7345260B2Mar 18, 2008
Heater and method of manufacturing the same
NGK INSULATORS LTD3 citations62
US7173220B2Feb 6, 2007
Heating device
NGK INSULATORS LTD2 citations62
US7401399B2Jul 22, 2008
Method of manufacturing a substrate heating device
NGK INSULATORS LTD3 citations61
US12573598B2Mar 10, 2026
Wafer placement table
NGK INSULATORS LTD0 citations60
US11602012B2Mar 7, 2023
Wafer placement table and method for manufacturing the same
NGK INSULATORS LTD0 citations60
US11688590B2Jun 27, 2023
Electrostatic-chuck heater
NGK INSULATORS LTD0 citations59
US11664203B2May 30, 2023
Electrostatic-chuck heater
NGK INSULATORS LTD0 citations59
US11483901B2Oct 25, 2022
Ceramic heater
NGK INSULATORS LTD0 citations51
US12452963B2Oct 21, 2025
Ceramic heater
NGK INSULATORS LTD0 citations49
US12398465B2Aug 26, 2025
Ceramic heater
NGK INSULATORS LTD0 citations49
US12170190B2Dec 17, 2024
Wafer support table and RF rod
NGK INSULATORS LTD0 citations49
US7432474B2Oct 7, 2008
Heating device
NGK INSULATORS LTD0 citations41
US9548226B2Jan 17, 2017
Member for semiconductor manufacturing apparatus and method for manufacturing the same
NGK INSULATORS LTD0 citations40
US7948516B2May 24, 2011
Position accuracy evaluation method and position accuracy evaluation apparatus
NGK INSULATORS LTD0 citations39
US7686889B2Mar 30, 2010
Susceptor for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations39
US10861680B2Dec 8, 2020
Wafer support
NGK INSULATORS LTD0 citations34