Inventor
SHOJO TOMOYASU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “SHOJO TOMOYASU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
10 patentsUS7557347B2Jul 7, 2009
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
HITACHI HIGH TECH CORP11 citations84
US7875849B2Jan 25, 2011
Electron beam apparatus and electron beam inspection method
HITACHI HIGH TECH CORP7 citations83
US10121632B2Nov 6, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US11211224B2Dec 28, 2021
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US9159533B2Oct 13, 2015
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP1 citations62
US8785890B2Jul 22, 2014
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP2 citations62
US8026481B2Sep 27, 2011
Charged particle apparatus, scanning electron microscope, and sample inspection method
HITACHI HIGH TECH CORP6 citations62
US9799483B2Oct 24, 2017
Charged particle beam device and detection method using said device
HITACHI HIGH TECH CORP1 citations52
US9384940B2Jul 5, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations41
US8859962B2Oct 14, 2014
Charged-particle microscope
HITACHI HIGH TECH CORP0 citations40
FUKUDA MUNEYUKI
5 patentsUS8841612B2Sep 23, 2014
Charged particle beam microscope
FUKUDA MUNEYUKI12 citations83
US8389935B2Mar 5, 2013
Charged particle beam apparatus permitting high-resolution and high-contrast observation
FUKUDA MUNEYUKI7 citations83
US8431915B2Apr 30, 2013
Charged particle beam apparatus permitting high resolution and high-contrast observation
FUKUDA MUNEYUKI4 citations73
US8431893B2Apr 30, 2013
Electron beam apparatus and electron beam inspection method
FUKUDA MUNEYUKI4 citations61
US8207498B2Jun 26, 2012
Electron beam apparatus and electron beam inspection method
FUKUDA MUNEYUKI4 citations61