Inventor
SATO MITSUGU
JP129 patents
⚠️ This page may combine multiple inventors who share the name “SATO MITSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
30 patentsUS6538249B1Mar 25, 2003
Image-formation apparatus using charged particle beams under various focus conditions
HITACHI LTD118 citations99
US6875984B2Apr 5, 2005
Bio electron microscope and observation method of specimen
HITACHI LTD105 citations98
US6838667B2Jan 4, 2005
Method and apparatus for charged particle beam microscopy
HITACHI LTD59 citations96
US6348690B1Feb 19, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD51 citations96
US5894124AApr 13, 1999
Scanning electron microscope and its analogous device
HITACHI LTD61 citations96
US5608218AMar 4, 1997
Scanning electron microscope
HITACHI LTD69 citations96
US7642514B2Jan 5, 2010
Charged particle beam apparatus
HITACHI LTD14 citations93
US7236651B2Jun 26, 2007
Image evaluation method and microscope
HITACHI LTD16 citations93
US7109485B2Sep 19, 2006
Charged particle beam apparatus
HITACHI LTD19 citations93
US7075078B2Jul 11, 2006
Scanning electron microscope
HITACHI LTD20 citations93
US6936818B2Aug 30, 2005
Charged particle beam apparatus
HITACHI LTD12 citations93
US6885001B2Apr 26, 2005
Scanning electron microscope
HITACHI LTD20 citations93
US6864493B2Mar 8, 2005
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD36 citations93
US6864482B2Mar 8, 2005
Electron beam apparatus
HITACHI LTD16 citations93
US6787772B2Sep 7, 2004
Scanning electron microscope
HITACHI LTD32 citations93
US6653633B2Nov 25, 2003
Charged particle beam apparatus
HITACHI LTD22 citations93
US6627889B2Sep 30, 2003
Apparatus and method for observing sample using electron beam
HITACHI LTD21 citations93
US6043491AMar 28, 2000
Scanning electron microscope
HITACHI LTD44 citations93
US5731580AMar 24, 1998
Scanning electron microscope
HITACHI LTD19 citations93
US5670782ASep 23, 1997
Scanning electron microscope and speciman observation method thereby
HITACHI LTD27 citations93
US5387793AFeb 7, 1995
Scanning electron microscope
HITACHI LTD31 citations93
US4983832AJan 8, 1991
Scanning electron microscope
HITACHI LTD40 citations93
US6555816B1Apr 29, 2003
Scanning electron microscope and sample observation method using the same
HITACHI LTD35 citations92
US6555819B1Apr 29, 2003
Scanning electron microscope
HITACHI LTD19 citations92
US6501077B1Dec 31, 2002
Scanning electron microscope
HITACHI LTD31 citations92
US6452178B2Sep 17, 2002
Method and an apparatus of an inspection system using an electron beam
HITACHI LTD23 citations92
US5903004AMay 11, 1999
Energy dispersive X-ray analyzer
HITACHI LTD44 citations92
US6166380ADec 26, 2000
Resolving power evaluation method and specimen for electron microscope
HITACHI LTD30 citations88
US7605381B2Oct 20, 2009
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD9 citations84
US7186975B2Mar 6, 2007
Scanning charged-particle microscope
HITACHI LTD15 citations84
HITACHI HIGH TECH CORP
18 patentsUS7582885B2Sep 1, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP61 citations98
US7022983B2Apr 4, 2006
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP15 citations93
US6956211B2Oct 18, 2005
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP15 citations93
US6791084B2Sep 14, 2004
Method and scanning electron microscope for measuring dimension of material on sample
HITACHI HIGH TECH CORP51 citations93
US7615765B2Nov 10, 2009
Charged particle beam apparatus
HITACHI HIGH TECH CORP23 citations92
US7462828B2Dec 9, 2008
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008
Inspection method and inspection apparatus using charged particle beam
HITACHI HIGH TECH CORP28 citations92
US7381968B2Jun 3, 2008
Charged particle beam apparatus and specimen holder
HITACHI HIGH TECH CORP28 citations92
US7339167B2Mar 4, 2008
Charged particle beam apparatus
HITACHI HIGH TECH CORP29 citations92
US7214936B2May 8, 2007
Charged particle beam apparatus and dimension measuring method
HITACHI HIGH TECH CORP15 citations92
US7112792B2Sep 26, 2006
Defect inspection and charged particle beam apparatus
HITACHI HIGH TECH CORP16 citations92
US7034296B2Apr 25, 2006
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP24 citations92
US7105816B2Sep 12, 2006
Electron beam device
HITACHI HIGH TECH CORP21 citations91
US7928377B2Apr 19, 2011
Charged particle beam apparatus and sample manufacturing method
HITACHI HIGH TECH CORP14 citations84
US7888640B2Feb 15, 2011
Scanning electron microscope and method of imaging an object by using the scanning electron microscope
HITACHI HIGH TECH CORP9 citations84
US7807980B2Oct 5, 2010
Charged particle beam apparatus and methods for capturing images using the same
HITACHI HIGH TECH CORP11 citations84
US7355174B2Apr 8, 2008
Charged particle beam emitting device and method for adjusting the optical axis
HITACHI HIGH TECH CORP10 citations84
US7282722B2Oct 16, 2007
Charged particle beam apparatus and charged particle beam irradiation method
HITACHI HIGH TECH CORP10 citations84
FUKADA ATSUKO
1 patentHITACHI SCIENCE SYSTEMS INC
1 patentShowing the top 50 of 129 patents by PatentIndex Score.