Inventor
FUKADA ATSUKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “FUKADA ATSUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
6 patentsUS7462828B2Dec 9, 2008
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008
Inspection method and inspection apparatus using charged particle beam
HITACHI HIGH TECH CORP28 citations92
US7875849B2Jan 25, 2011
Electron beam apparatus and electron beam inspection method
HITACHI HIGH TECH CORP7 citations83
US8026481B2Sep 27, 2011
Charged particle apparatus, scanning electron microscope, and sample inspection method
HITACHI HIGH TECH CORP6 citations62
US7847249B2Dec 7, 2010
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations62
US7504626B2Mar 17, 2009
Scanning electron microscope and apparatus for detecting defect
HITACHI HIGH TECH CORP3 citations62