Inventor
SUZUKI NAOMASA
JP54 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI NAOMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
26 patentsUS7462828B2Dec 9, 2008
Inspection method and inspection system using charged particle beam
HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008
Inspection method and inspection apparatus using charged particle beam
HITACHI HIGH TECH CORP28 citations92
US6765205B2Jul 20, 2004
Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same
HITACHI HIGH TECH CORP37 citations92
US9659744B2May 23, 2017
Charged particle beam apparatus and inspection method using the same
HITACHI HIGH TECH CORP7 citations84
US7888640B2Feb 15, 2011
Scanning electron microscope and method of imaging an object by using the scanning electron microscope
HITACHI HIGH TECH CORP9 citations84
US7557347B2Jul 7, 2009
Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same
HITACHI HIGH TECH CORP11 citations84
US10879037B2Dec 29, 2020
Charged particle beam device with distance setting between irradiation regions in a scan line
HITACHI HIGH TECH CORP8 citations83
US7875849B2Jan 25, 2011
Electron beam apparatus and electron beam inspection method
HITACHI HIGH TECH CORP7 citations83
US9704687B2Jul 11, 2017
Charged particle beam application device
HITACHI HIGH TECH CORP5 citations73
US10832886B2Nov 10, 2020
Beam irradiation device
HITACHI HIGH TECH CORP3 citations72
US10269536B2Apr 23, 2019
Electron microscope
HITACHI HIGH TECH CORP4 citations72
US10121632B2Nov 6, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US9644955B2May 9, 2017
Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same
HITACHI HIGH TECH CORP2 citations72
US9324540B2Apr 26, 2016
Charged particle beam device
HITACHI HIGH TECH CORP3 citations72
US9653256B2May 16, 2017
Charged particle-beam device
HITACHI HIGH TECH CORP4 citations71
US9287084B2Mar 15, 2016
Aberration corrector and charged particle beam apparatus using the same
HITACHI HIGH TECH CORP3 citations71
US11852599B2Dec 26, 2023
Image processing system
HITACHI HIGH TECH CORP0 citations62
US11211224B2Dec 28, 2021
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US9159533B2Oct 13, 2015
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP1 citations62
US8785890B2Jul 22, 2014
Charged particle beam apparatus permitting high-resolution and high-contrast observation
HITACHI HIGH TECH CORP2 citations62
US7619219B2Nov 17, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations62
US7504626B2Mar 17, 2009
Scanning electron microscope and apparatus for detecting defect
HITACHI HIGH TECH CORP3 citations62
US11239042B2Feb 1, 2022
Beam irradiation device
HITACHI HIGH TECH CORP0 citations61
US10971328B2Apr 6, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations59
US10734191B2Aug 4, 2020
Charged particle beam device
HITACHI HIGH TECH CORP1 citations59
US9287082B2Mar 15, 2016
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations52
HITACHI LTD
10 patentsUS6847038B2Jan 25, 2005
Scanning electron microscope
HITACHI LTD74 citations98
US6646262B1Nov 11, 2003
Scanning electron microscope
HITACHI LTD57 citations96
US5731580AMar 24, 1998
Scanning electron microscope
HITACHI LTD19 citations93
US6555819B1Apr 29, 2003
Scanning electron microscope
HITACHI LTD19 citations92
US5903004AMay 11, 1999
Energy dispersive X-ray analyzer
HITACHI LTD44 citations92
US7049591B2May 23, 2006
Scanning electron microscope
HITACHI LTD11 citations84
US6025593AFeb 15, 2000
Scanning electron microscope
HITACHI LTD16 citations84
US7399966B2Jul 15, 2008
Scanning electron microscope
HITACHI LTD6 citations74
US7294835B2Nov 13, 2007
Scanning electron microscope
HITACHI LTD3 citations63
US6979821B2Dec 27, 2005
Scanning electron microscope
HITACHI LTD2 citations62
FUKUDA MUNEYUKI
6 patentsUS8841612B2Sep 23, 2014
Charged particle beam microscope
FUKUDA MUNEYUKI12 citations83
US8389935B2Mar 5, 2013
Charged particle beam apparatus permitting high-resolution and high-contrast observation
FUKUDA MUNEYUKI7 citations83
US9123501B2Sep 1, 2015
Device for correcting diffraction aberration of electron beam
FUKUDA MUNEYUKI4 citations73
US8431915B2Apr 30, 2013
Charged particle beam apparatus permitting high resolution and high-contrast observation
FUKUDA MUNEYUKI4 citations73
US8431893B2Apr 30, 2013
Electron beam apparatus and electron beam inspection method
FUKUDA MUNEYUKI4 citations61
US8207498B2Jun 26, 2012
Electron beam apparatus and electron beam inspection method
FUKUDA MUNEYUKI4 citations61
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
2 patentsFUKADA ATSUKO
1 patentTAKADA SATOSHI
1 patentTSUJI HIROSHI
1 patentTAKAHASHI NORITSUGU
1 patentSHOJO TOMOYASU
1 patentTACHIBANA ICHIRO
1 patentShowing the top 50 of 54 patents by PatentIndex Score.