P

Inventor

SUZUKI NAOMASA

JP54 patents
⚠️ This page may combine multiple inventors who share the name “SUZUKI NAOMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

26 patents
US7462828B2Dec 9, 2008

Inspection method and inspection system using charged particle beam

HITACHI HIGH TECH CORP18 citations92
US7449690B2Nov 11, 2008

Inspection method and inspection apparatus using charged particle beam

HITACHI HIGH TECH CORP28 citations92
US6765205B2Jul 20, 2004

Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same

HITACHI HIGH TECH CORP37 citations92
US9659744B2May 23, 2017

Charged particle beam apparatus and inspection method using the same

HITACHI HIGH TECH CORP7 citations84
US7888640B2Feb 15, 2011

Scanning electron microscope and method of imaging an object by using the scanning electron microscope

HITACHI HIGH TECH CORP9 citations84
US7557347B2Jul 7, 2009

Charged particle beam apparatus, scanning electron microscope, and sample observation method using the same

HITACHI HIGH TECH CORP11 citations84
US10879037B2Dec 29, 2020

Charged particle beam device with distance setting between irradiation regions in a scan line

HITACHI HIGH TECH CORP8 citations83
US7875849B2Jan 25, 2011

Electron beam apparatus and electron beam inspection method

HITACHI HIGH TECH CORP7 citations83
US9704687B2Jul 11, 2017

Charged particle beam application device

HITACHI HIGH TECH CORP5 citations73
US10832886B2Nov 10, 2020

Beam irradiation device

HITACHI HIGH TECH CORP3 citations72
US10269536B2Apr 23, 2019

Electron microscope

HITACHI HIGH TECH CORP4 citations72
US10121632B2Nov 6, 2018

Charged particle beam apparatus

HITACHI HIGH TECH CORP2 citations72
US9644955B2May 9, 2017

Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same

HITACHI HIGH TECH CORP2 citations72
US9324540B2Apr 26, 2016

Charged particle beam device

HITACHI HIGH TECH CORP3 citations72
US9653256B2May 16, 2017

Charged particle-beam device

HITACHI HIGH TECH CORP4 citations71
US9287084B2Mar 15, 2016

Aberration corrector and charged particle beam apparatus using the same

HITACHI HIGH TECH CORP3 citations71
US11852599B2Dec 26, 2023

Image processing system

HITACHI HIGH TECH CORP0 citations62
US11211224B2Dec 28, 2021

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations62
US9159533B2Oct 13, 2015

Charged particle beam apparatus permitting high-resolution and high-contrast observation

HITACHI HIGH TECH CORP1 citations62
US8785890B2Jul 22, 2014

Charged particle beam apparatus permitting high-resolution and high-contrast observation

HITACHI HIGH TECH CORP2 citations62
US7619219B2Nov 17, 2009

Scanning electron microscope

HITACHI HIGH TECH CORP4 citations62
US7504626B2Mar 17, 2009

Scanning electron microscope and apparatus for detecting defect

HITACHI HIGH TECH CORP3 citations62
US11239042B2Feb 1, 2022

Beam irradiation device

HITACHI HIGH TECH CORP0 citations61
US10971328B2Apr 6, 2021

Charged particle beam device

HITACHI HIGH TECH CORP0 citations59
US10734191B2Aug 4, 2020

Charged particle beam device

HITACHI HIGH TECH CORP1 citations59
US9287082B2Mar 15, 2016

Charged particle beam apparatus

HITACHI HIGH TECH CORP0 citations52

HITACHI LTD

10 patents

FUKUDA MUNEYUKI

6 patents

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

2 patents

FUKADA ATSUKO

1 patent

TAKADA SATOSHI

1 patent

TSUJI HIROSHI

1 patent

TAKAHASHI NORITSUGU

1 patent

SHOJO TOMOYASU

1 patent

TACHIBANA ICHIRO

1 patent

Showing the top 50 of 54 patents by PatentIndex Score.