Inventor
TACHIBANA ICHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TACHIBANA ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
8 patentsUS7888640B2Feb 15, 2011
Scanning electron microscope and method of imaging an object by using the scanning electron microscope
HITACHI HIGH TECH CORP9 citations84
US7875849B2Jan 25, 2011
Electron beam apparatus and electron beam inspection method
HITACHI HIGH TECH CORP7 citations83
US9324540B2Apr 26, 2016
Charged particle beam device
HITACHI HIGH TECH CORP3 citations72
US7619219B2Nov 17, 2009
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations62
US7504626B2Mar 17, 2009
Scanning electron microscope and apparatus for detecting defect
HITACHI HIGH TECH CORP3 citations62
US10971328B2Apr 6, 2021
Charged particle beam device
HITACHI HIGH TECH CORP0 citations59
US10734191B2Aug 4, 2020
Charged particle beam device
HITACHI HIGH TECH CORP1 citations59
US12525430B2Jan 13, 2026
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations58