Inventor

NAKAHARADA MASAHIRO

JP10 patents

⚠️ This page may combine multiple inventors who share the name “NAKAHARADA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

8 patents

US9984904B2May 29, 2018

Substrate treatment system, substrate transfer method and computer storage medium

TOKYO ELECTRON LTD5 citations83

US9460942B2Oct 4, 2016

Substrate treatment system, substrate transfer method and computer storage medium

TOKYO ELECTRON LTD7 citations83

US7563042B2Jul 21, 2009

Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus

TOKYO ELECTRON LTD16 citations83

US9984905B2May 29, 2018

Substrate treatment system, substrate transfer method and computer storage medium

TOKYO ELECTRON LTD3 citations72

US9287145B2Mar 15, 2016

Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium

TOKYO ELECTRON LTD7 citations72

US10359320B2Jul 23, 2019

Method of measuring a temperature of a heat plate and method thereof

TOKYO ELECTRON LTD3 citations69

US7284917B2Oct 23, 2007

Coating and developing system and coating and developing method

TOKYO ELECTRON LTD5 citations62

US9082800B2Jul 14, 2015

Substrate treatment system, substrate transfer method and non-transitory computer-readable storage medium

TOKYO ELECTRON LTD2 citations61

ENOKIDA SUGURU

1 patent

US8985929B2Mar 24, 2015

Substrate processing apparatus, substrate processing method and storage medium

ENOKIDA SUGURU7 citations77

NAKAHARADA MASAHIRO

1 patent

US8441618B2May 14, 2013

Substrate transfer method and apparatus

NAKAHARADA MASAHIRO4 citations57