Inventor
SAKATA YOJI
JP6 patents
Patents
6 patentsUS9984904B2May 29, 2018
Substrate treatment system, substrate transfer method and computer storage medium
TOKYO ELECTRON LTD5 citations83
US9460942B2Oct 4, 2016
Substrate treatment system, substrate transfer method and computer storage medium
TOKYO ELECTRON LTD7 citations83
US9984905B2May 29, 2018
Substrate treatment system, substrate transfer method and computer storage medium
TOKYO ELECTRON LTD3 citations72
US9287145B2Mar 15, 2016
Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium
TOKYO ELECTRON LTD7 citations72
US11971661B2Apr 30, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12591180B2Mar 31, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations44