Inventor
PATRICK ROGER
US32 patents
⚠️ This page may combine multiple inventors who share the name “PATRICK ROGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS6174450B1Jan 16, 2001
Methods and apparatus for controlling ion energy and plasma density in a plasma processing system
LAM RES CORP400 citations98
US5869877AFeb 9, 1999
Methods and apparatus for detecting pattern dependent charging on a workpiece in a plasma processing system
LAM RES CORP42 citations92
US7190119B2Mar 13, 2007
Methods and apparatus for optimizing a substrate in a plasma processing system
LAM RES CORP22 citations91
US6309979B1Oct 30, 2001
Methods for reducing plasma-induced charging damage
LAM RES CORP23 citations87
US5904571AMay 18, 1999
Methods and apparatus for reducing charging during plasma processing
LAM RES CORP19 citations85
US8796153B2Aug 5, 2014
Clamped monolithic showerhead electrode
LAM RES CORP7 citations84
US8343305B2Jan 1, 2013
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
LAM RES CORP6 citations84
US9927798B2Mar 27, 2018
Mobile connectivity and control of semiconductor manufacturing equipment
LAM RES CORP3 citations67
US9541514B2Jan 10, 2017
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
LAM RES CORP1 citations63
US9279758B2Mar 8, 2016
Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
LAM RES CORP1 citations63
US7228257B1Jun 5, 2007
Architecture for general purpose programmable semiconductor processing system and methods therefor
LAM RES CORP5 citations63
US12198896B2Jan 14, 2025
Compact high density plasma source
LAM RES CORP1 citations59
LSI LOGIC CORP
12 patentsUS5556549ASep 17, 1996
Power control and delivery in plasma processing equipment
LSI LOGIC CORP257 citations97
US5474648ADec 12, 1995
Uniform and repeatable plasma processing
LSI LOGIC CORP237 citations97
US5401350AMar 28, 1995
Coil configurations for improved uniformity in inductively coupled plasma systems
LSI LOGIC CORP370 citations97
US5471091ANov 28, 1995
Techniques for via formation and filling
LSI LOGIC CORP42 citations96
US4879257ANov 7, 1989
Planarization process
LSI LOGIC CORP92 citations96
US5639519AJun 17, 1997
Method for igniting low pressure inductively coupled plasma
LSI LOGIC CORP40 citations95
US5468296ANov 21, 1995
Apparatus for igniting low pressure inductively coupled plasma
LSI LOGIC CORP80 citations95
US5407524AApr 18, 1995
End-point detection in plasma etching by monitoring radio frequency matching network
LSI LOGIC CORP73 citations95
US5578165ANov 26, 1996
Coil configurations for improved uniformity in inductively coupled plasma systems
LSI LOGIC CORP31 citations91
US5217566AJun 8, 1993
Densifying and polishing glass layers
LSI LOGIC CORP16 citations74
US6062163AMay 16, 2000
Plasma initiating assembly
LSI LOGIC CORP12 citations73
US5354706AOct 11, 1994
Formation of uniform dimension conductive lines on a semiconductor wafer
LSI LOGIC CORP2 citations63
PATRICK ROGER
4 patentsUS8221582B2Jul 17, 2012
Clamped monolithic showerhead electrode
PATRICK ROGER67 citations97
US8414719B2Apr 9, 2013
Clamped monolithic showerhead electrode
PATRICK ROGER13 citations83
US8216418B2Jul 10, 2012
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings
PATRICK ROGER13 citations82
US8187413B2May 29, 2012
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket
PATRICK ROGER5 citations60