Inventor

DHINDSA RAJ

US7 patents

⚠️ This page may combine multiple inventors who share the name “DHINDSA RAJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7169256B2Jan 30, 2007

Plasma processor with electrode responsive to multiple RF frequencies

LAM RES CORP60 citations93

US7405521B2Jul 29, 2008

Multiple frequency plasma processor method and apparatus

LAM RES CORP35 citations91

PATRICK ROGER

2 patents

US8216418B2Jul 10, 2012

Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings

PATRICK ROGER13 citations82

US8187413B2May 29, 2012

Electrode assembly and plasma processing chamber utilizing thermally conductive gasket

PATRICK ROGER5 citations60

BETTENCOURT GREG

2 patents

US8152954B2Apr 10, 2012

Showerhead electrode assemblies and plasma processing chambers incorporating the same

BETTENCOURT GREG7 citations77

US8268117B2Sep 18, 2012

Showerhead electrodes

BETTENCOURT GREG1 citations45

LENZ ERIC

1 patent

US8674255B1Mar 18, 2014

Apparatus and method for controlling etch uniformity

LENZ ERIC23 citations90