Inventor

BETTENCOURT GREG

US4 patents

⚠️ This page may combine multiple inventors who share the name “BETTENCOURT GREG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PATRICK ROGER

2 patents

US8216418B2Jul 10, 2012

Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings

PATRICK ROGER13 citations82

US8187413B2May 29, 2012

Electrode assembly and plasma processing chamber utilizing thermally conductive gasket

PATRICK ROGER5 citations60

BETTENCOURT GREG

2 patents

US8152954B2Apr 10, 2012

Showerhead electrode assemblies and plasma processing chambers incorporating the same

BETTENCOURT GREG7 citations77

US8268117B2Sep 18, 2012

Showerhead electrodes

BETTENCOURT GREG1 citations45