Inventor

HIGASHISAKA RYUJI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HIGASHISAKA RYUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

2 patents

US9425029B2Aug 23, 2016

Processing apparatus having a first shield and a second shield arranged to sandwich a substrate

CANON ANELVA CORP10 citations82

US9905404B2Feb 27, 2018

Sputtering apparatus

CANON ANELVA CORP0 citations49

HIGASHISAKA RYUJI

2 patents

US9200362B2Dec 1, 2015

Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device

HIGASHISAKA RYUJI1 citations44

US9997386B2Jun 12, 2018

Substrate holder mounting device and substrate holder container chamber

HIGASHISAKA RYUJI0 citations29

SONE HIROSHI

1 patent

US8202034B2Jun 19, 2012

Vacuum processing apparatus and substrate transfer method

SONE HIROSHI4 citations53