Inventor

WAKABAYASHI HIDEKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “WAKABAYASHI HIDEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents

US12054841B2Aug 6, 2024

Apparatus for plating and method of plating

EBARA CORP0 citations44

US11866842B2Jan 9, 2024

Short circuit detection method in plating apparatus, control method of plating apparatus, and plating apparatus

EBARA CORP0 citations41

US11661669B2May 30, 2023

Substrate processing system, controller and method using test operation without substrate

EBARA CORP0 citations41

HIGASHISAKA RYUJI

1 patent

US9997386B2Jun 12, 2018

Substrate holder mounting device and substrate holder container chamber

HIGASHISAKA RYUJI0 citations29