Inventor
FICHTER EDGAR
DE4 patents
Patents
4 patentsUS9953804B2Apr 24, 2018
High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus
ZEISS CARL MICROSCOPY GMBH5 citations69
US10546717B2Jan 28, 2020
High-voltage supply unit and circuit arrangement for generating a high voltage for a particle beam apparatus
ZEISS CARL MICROSCOPY GMBH1 citations59
US9312093B1Apr 12, 2016
Particle beam device comprising an electrode unit
ZEISS CARL MICROSCOPY GMBH1 citations47
US9947504B2Apr 17, 2018
Particle beam apparatus and method for operating a particle beam apparatus
ZEISS CARL MICROSCOPY GMBH0 citations35