Inventor
LIEBERER MARKUS
DE9 patents
⚠️ This page may combine multiple inventors who share the name “LIEBERER MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
5 patentsUS11610824B2Mar 21, 2023
Transmission-based temperature measurement of a workpiece in a thermal processing system
MATTSON TECH INC2 citations71
US12027427B2Jul 2, 2024
Preheat processes for millisecond anneal system
MATTSON TECH INC2 citations68
US11644817B2May 9, 2023
Control system for adaptive control of a thermal processing system
MATTSON TECH INC0 citations61
US12399064B2Aug 26, 2025
Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures
MATTSON TECH INC0 citations51
US10727140B2Jul 28, 2020
Preheat processes for millisecond anneal system
MATTSON TECH INC0 citations47
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD
4 patentsUS11955388B2Apr 9, 2024
Transmission-based temperature measurement of a workpiece in a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD1 citations71
US12174616B2Dec 24, 2024
Control system for adaptive control of a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations61
US12400916B2Aug 26, 2025
Transmission-based temperature measurement of a workpiece in a thermal processing system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations60
US12476151B2Nov 18, 2025
Preheat processes for millisecond anneal system
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations57