Inventor

vanAbbema Michael

DE3 patents

⚠️ This page may combine multiple inventors who share the name “vanAbbema Michael”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

2 patents

US12027427B2Jul 2, 2024

Preheat processes for millisecond anneal system

MATTSON TECH INC2 citations68

US10727140B2Jul 28, 2020

Preheat processes for millisecond anneal system

MATTSON TECH INC0 citations47

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD

1 patent

US12476151B2Nov 18, 2025

Preheat processes for millisecond anneal system

BEIJING E TOWN SEMICONDUCTOR TECH CO LTD0 citations57