Inventor
COSCEEV ALEXANDR
DE6 patents
⚠️ This page may combine multiple inventors who share the name “COSCEEV ALEXANDR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATTSON TECH INC
5 patentsUS10770309B2Sep 8, 2020
Features for improving process uniformity in a millisecond anneal system
MATTSON TECH INC2 citations69
US12027427B2Jul 2, 2024
Preheat processes for millisecond anneal system
MATTSON TECH INC2 citations68
US12014920B2Jun 18, 2024
Apparatus for hydrogen assisted atmospheric radical oxidation
MATTSON TECH INC0 citations59
US11521847B2Dec 6, 2022
Hydrogen assisted atmospheric radical oxidation
MATTSON TECH INC0 citations59
US10727140B2Jul 28, 2020
Preheat processes for millisecond anneal system
MATTSON TECH INC0 citations47