Inventor
WANG CHIEH-JU
TW6 patents
⚠️ This page may combine multiple inventors who share the name “WANG CHIEH-JU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
4 patentsUS10472567B2Nov 12, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US10428271B2Oct 1, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC3 citations71
US11152219B2Oct 19, 2021
Selectively etching materials
ENTEGRIS INC0 citations49
US10790187B2Sep 29, 2020
Post-etch residue removal for advanced node beol processing
ENTEGRIS INC0 citations48