Inventor

YAU JYH-CHERNG

TW6 patents

⚠️ This page may combine multiple inventors who share the name “YAU JYH-CHERNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNITED MICROELECTRONICS CORP

2 patents

US7767578B2Aug 3, 2010

Damascene interconnection structure and dual damascene process thereof

UNITED MICROELECTRONICS CORP5 citations72

US7977244B2Jul 12, 2011

Semiconductor manufacturing process

UNITED MICROELECTRONICS CORP6 citations61

WANG CHIEH-JU

1 patent

US8282842B2Oct 9, 2012

Cleaning method following opening etch

WANG CHIEH-JU3 citations54

HUANG CHUN-JEN

1 patent

US8080877B2Dec 20, 2011

Damascene interconnection structure and dual damascene process thereof

HUANG CHUN-JEN0 citations49

LEE CHANG-HSIAO

1 patent

US8137472B2Mar 20, 2012

Semiconductor process

LEE CHANG-HSIAO0 citations47

FENG CHIH-WEN

1 patent

US8101092B2Jan 24, 2012

Method for controlling ADI-AEI CD difference ratio of openings having different sizes

FENG CHIH-WEN1 citations44