Inventor
PAN YI-HSUN
TW3 patents
Patents
3 patentsUS9857680B2Jan 2, 2018
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US11237478B2Feb 1, 2022
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10747105B2Aug 18, 2020
Cleaning module, cleaning apparatus and method of cleaning photomask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47