Inventor
CHOU TZU-TING
TW6 patents
Patents
6 patentsUS9658526B2May 23, 2017
Mask pellicle indicator for haze prevention
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US12176299B2Dec 24, 2024
Semiconductor device and manufacturing method thereof
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US11587887B2Feb 21, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11079669B2Aug 3, 2021
System and method for localized EUV pellicle glue removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10520805B2Dec 31, 2019
System and method for localized EUV pellicle glue removal
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12354997B2Jul 8, 2025
Package structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51