Inventor
CHANG TSUNG-HSIEN
TW3 patents
Patents
3 patentsUS11772228B2Oct 3, 2023
Chemical mechanical polishing apparatus including a multi-zone platen
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11980040B2May 7, 2024
Semiconductor device with magnetic tunnel junctions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11037981B2Jun 15, 2021
Semiconductor device with magnetic tunnel junctions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61