Inventor
TOKUNAGA SHINPEI
JP6 patents
Patents
6 patentsUS12123714B2Oct 22, 2024
Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor
EBARA CORP0 citations60
US11852472B2Dec 26, 2023
Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor
EBARA CORP0 citations60
US12571767B2Mar 10, 2026
Eddy current sensor, polishing apparatus, and film thickness detection method
EBARA CORP0 citations59
US12179310B2Dec 31, 2024
Output signal processing apparatus for eddy current sensor
EBARA CORP0 citations50
US11633828B2Apr 25, 2023
Substrate polishing system, substrate polishing method and substrate polishing apparatus
EBARA CORP0 citations49
US11731233B2Aug 22, 2023
Eddy current detection device and polishing apparatus
EBARA CORP0 citations48