Inventor
POPONIAK MICHAEL R
US10 patents
Patents
10 patentsUS4028149AJun 7, 1977
Process for forming monocrystalline silicon carbide on silicon substrates
IBM75 citations94
US3962052AJun 8, 1976
Process for forming apertures in silicon bodies
IBM72 citations94
US4333227AJun 8, 1982
Process for fabricating a self-aligned micrometer bipolar transistor device
IBM43 citations92
US4069068AJan 17, 1978
Semiconductor fabrication method for improved device yield by minimizing pipes between common conductivity type regions
IBM28 citations80
US4144636AMar 20, 1979
Method for manufacture of a moisture sensor
IBM29 citations76
US4542579ASep 24, 1985
Method for forming aluminum oxide dielectric isolation in integrated circuits
IBM8 citations73
US4303933ADec 1, 1981
Self-aligned micrometer bipolar transistor device and process
IBM15 citations73
US4180439ADec 25, 1979
Anodic etching method for the detection of electrically active defects in silicon
IBM15 citations71
US3982967ASep 28, 1976
Method of proton-enhanced diffusion for simultaneously forming integrated circuit regions of varying depths
IBM13 citations69
US4504330AMar 12, 1985
Optimum reduced pressure epitaxial growth process to prevent autodoping
IBM5 citations59