Inventor

FURUKAWA HEISABURO

JP3 patents

Patents

3 patents

US4552092ANov 12, 1985

Vacuum vapor deposition system

MITSUBISHI HEAVY IND LTD25 citations80

US4649860AMar 17, 1987

Vacuum evaporation coating equipment

MITSUBISHI HEAVY IND LTD16 citations72

US5169451ADec 8, 1992

Vacuum vapor deposition apparatus

MITSUBISHI HEAVY IND LTD5 citations53