Inventor

ESHIMA KAZUYOSHI

JP13 patents

⚠️ This page may combine multiple inventors who share the name “ESHIMA KAZUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US10276408B2Apr 30, 2019

Flow-rate regulator device, diluted chemical-liquid supply device, liquid processing apparatus and its operating system

TOKYO ELECTRON LTD2 citations70

US9452397B2Sep 27, 2016

Liquid processing apparatus, liquid processing method, and storage medium that stores computer program for implementing liquid processing method

TOKYO ELECTRON LTD2 citations62

US7900640B2Mar 8, 2011

Cleaning apparatus including cleaning tank with improved cover

TOKYO ELECTRON LTD5 citations61

ESHIMA KAZUYOSHI

2 patents

US8607730B2Dec 17, 2013

Method of replacing liquid of circulation line in substrate liquid processing apparatus of single-wafer type

ESHIMA KAZUYOSHI2 citations58

US8590548B2Nov 26, 2013

Liquid processing apparatus for substrate, method for generating processing liquid, and computer readable recording medium storing program for generating processing liquid therein

ESHIMA KAZUYOSHI3 citations58

BRIDGESTONE CYCLE CO

1 patent

US5370411ADec 6, 1994

Bicycle frame assembly

BRIDGESTONE CYCLE CO77 citations92

NISHIDA TOSHIHIKO

1 patent

US8670656B2Mar 11, 2014

Liquid heating unit, liquid processing apparatus including the same, and liquid processing method

NISHIDA TOSHIHIKO9 citations77

SATO HIDEAKI

1 patent

US8777695B2Jul 15, 2014

Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method

SATO HIDEAKI4 citations69

MINAMIDA JUNYA

1 patent

US8978670B2Mar 17, 2015

Substrate processing apparatus

MINAMIDA JUNYA4 citations68

WATANABE TSUKASA

1 patent

US8083857B2Dec 27, 2011

Substrate cleaning method and substrate cleaning apparatus

WATANABE TSUKASA2 citations61

TSURUSAKI KOTARO

1 patent

US8652344B2Feb 18, 2014

Liquid treatment method and storage system

TSURUSAKI KOTARO2 citations56

AMIYA MICHITAKA

1 patent

US8820335B2Sep 2, 2014

Cleaning apparatus, substrate processing system, cleaning method, program and storage medium

AMIYA MICHITAKA1 citations39

SASAKI KEISUKE

1 patent

US8408234B2Apr 2, 2013

Process liquid supply system, process liquid supply method, and storage medium

SASAKI KEISUKE0 citations36