Inventor

BREZOCZKY THOMAS

US44 patents

⚠️ This page may combine multiple inventors who share the name “BREZOCZKY THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BREZOCZKY THOMAS

APPLIED MATERIALS INC

Shield to prevent cryopump charcoal array from shedding during cryo-regeneration

Multiple zone carrier head with flexible membrane

Carrier head with multiple chambers

Pedestal assembly with enhanced thermal conductivity

In-situ getter in process cavity of processing chamber

Collimated and long throw magnetron sputtering of nickel/iron films for magnetic recording head applications

Substrate processing module and method of moving a workpiece

Substrate processing platforms including multiple processing chambers

Substrate holder replacement with protective disk during pasting process

Apparatus, system, and method for non-contact temperature monitoring of substrate supports

Pedestal assembly for a substrate processing chamber

Floating pin for substrate transfer

Electrostatic chuck having a heating and chucking capabilities

Apparatus and method for positioning an object at multiple positions within an enclosure

Substrate processing module and method of moving a workpiece

Apparatus, system, and method for non-contact temperature monitoring of substrate supports

Semiconductor process equipment

Semiconductor process equipment

Substrate carrier

Semiconductor process equipment

Apparatus for controlling lift pin movement

Semiconductor process equipment

Isolated volume seals and method of forming an isolated volume within a processing chamber

Apparatus for controlling lift pin movement

Isolated volume seals and method of forming an isolated volume within a processing chamber

Transfer apparatus and substrate-supporting member

Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure

Symmetric pump down mini-volume with laminar flow cavity gas injection for high and low pressure

Reduced substrate process chamber cavity volume

Methods and apparatus for wafer detection

Cathode exchange mechanism to improve preventative maintenance time for cluster system

Methods and apparatus for producing low angle depositions

Thermal management hardware for uniform temperature control for enhanced bake-out for cluster tool

Apparatus and method for positioning an object at multiple positions within an enclosure

Methods for electrostatic chuck ceramic surfacing

Passive lift pin assembly

LUCIRA HEALTH INC

Diagnostic device with LED display

Assay device with LCD display

APPLIED SILVER INC

Systems and processes for treating textiles with an antimicrobial agent

Systems and processes for treating textiles with an antimicrobial agent

CHEN HUNG CHIH

Multiple zone carrier head with flexible membrane

BULLER BENYAMIN

Support system for solar energy generator panels

PFIZER

Diagnostic device with led display

VELO3D INC

Three-dimensional printer components