Inventor

SKAPA HELMUT

DE3 patents

Patents

3 patents

US5937275AAug 10, 1999

Method of producing acceleration sensors

BOSCH GMBH ROBERT67 citations95

US6268232B1Jul 31, 2001

Method for fabricating a micromechanical component

BOSCH GMBH ROBERT12 citations72

US6656368B2Dec 2, 2003

Nonstick layer for a micromechanical component

BOSCH GMBH ROBERT4 citations61