Inventor
UDA MITSURU
JP12 patents
Patents
12 patentsUS5739890AApr 14, 1998
Liquid crystal display device and a method of fabricating same
IBM95 citations96
US6452671B1Sep 17, 2002
Illuminator for macro inspection, macro inspecting apparatus and macro inspecting method
IBM28 citations92
US6292246B1Sep 18, 2001
Reflection type liquid crystal device, manufacturing method therefor, and projection display system
IBM15 citations83
US7719672B2May 18, 2010
Macro inspection apparatus and microscopic inspection method
IBM16 citations79
US6825924B2Nov 30, 2004
Dual peak wavelength tube, illuminator for inspection, inspecting apparatus, and method thereof
IBM17 citations79
US6781650B1Aug 24, 2004
Liquid crystal light valve and method for producing same, and liquid crystal projection display device
IBM10 citations73
US6654129B1Nov 25, 2003
Film thickness testing apparatus and method
IBM6 citations72
US6040888AMar 21, 2000
Positioning of posts in liquid crystal valves for a projection display device
IBM10 citations66
US6614502B2Sep 2, 2003
Reflection type liquid crystal device, manufacturing method therefor, and projection display system
IBM4 citations61
US7440118B2Oct 21, 2008
Apparatus and method for color filter inspection
IBM5 citations60
US7310141B2Dec 18, 2007
Inspection device and inspection method for pattern profile, exposure system
IBM5 citations58
US7525651B2Apr 28, 2009
Inspection apparatus and inspection method for pattern profile, and exposure apparatus
IBM1 citations44