Inventor

MUEHLE SVEN

DE2 patents

Patents

2 patents

US7314824B2Jan 1, 2008

Nitrogen-free ARC/capping layer and method of manufacturing the same

ADVANCED MICRO DEVICES INC2 citations59

US7326646B2Feb 5, 2008

Nitrogen-free ARC layer and a method of manufacturing the same

ADVANCED MICRO DEVICES INC6 citations58