Inventor

VANHAELEMEERSCH SERGE

BE21 patents

⚠️ This page may combine multiple inventors who share the name “VANHAELEMEERSCH SERGE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VANHAELEMEERSCH SERGE

IMEC INTER UNI MICRO ELECTR

Formation of deep via airgaps for three dimensional wafer to wafer interconnect

Method for chip singulation

MIS transistors with a metal gate and high-k dielectric and method of forming

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

Method to produce a porous oxygen-silicon layer

Method for forming a FET having L-shaped insulating spacers

Method for removal of sic

Anisotropic etching of organic-containing insulating layers

Anisotropic etching of organic-containing insulating layers

Anisotropic etching of organic-containing insulating layers

Method of fabricating a semiconductor device

Method of producing microcystalline silicon germanium suitable for micromachining

IMEC VZW

Fluorinated hard mask for micropatterning of polymers

Method for stripping ion implanted photoresist layer

Fluorinated hard mask for micropatterning of polymers

Method for forming a spacer

IMEC

Protective treatment for porous materials

High aspect ratio via etch

Dual damascene patterning method

INTERUNIVERSITIAR MICROELEKTRO

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

INTERUNIVERSTAIR MICROELEKTRON

Integrated circuit having SiC layer