Inventor
LEE JAI-DONG
KR10 patents
Patents
10 patentsUS6797561B2Sep 28, 2004
Method of fabricating a capacitor of a semiconductor device
SAMSUNG ELECTRONICS CO LTD26 citations92
US7007933B2Mar 7, 2006
Method and apparatus for supplying a source gas
SAMSUNG ELECTRONICS CO LTD13 citations83
US7361560B2Apr 22, 2008
Method of manufacturing a dielectric layer in a memory device that includes nitriding step
SAMSUNG ELECTRONICS CO LTD8 citations73
US7223657B2May 29, 2007
Methods of fabricating flash memory devices with floating gates that have reduced seams
SAMSUNG ELECTRONICS CO LTD3 citations62
US7153362B2Dec 26, 2006
System and method for real time deposition process control based on resulting product detection
SAMSUNG ELECTRONICS CO LTD5 citations62
US7902059B2Mar 8, 2011
Methods of forming void-free layers in openings of semiconductor substrates
SAMSUNG ELECTRONICS CO LTD3 citations61
US7736963B2Jun 15, 2010
Method of forming a gate structure for a semiconductor device and method of forming a cell gate structure for a non-volatile memory device
SAMSUNG ELECTRONICS CO LTD5 citations61
US7592227B2Sep 22, 2009
Methods of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations61
US7459364B2Dec 2, 2008
Methods of forming self-aligned floating gates using multi-etching
SAMSUNG ELECTRONICS CO LTD4 citations61
US7629217B2Dec 8, 2009
Methods of forming void-free layers in openings of semiconductor substrates
SAMSUNG ELECTRONICS CO LTD0 citations51