Inventor
DETRICK TROY S
US8 patents
⚠️ This page may combine multiple inventors who share the name “DETRICK TROY S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS7968469B2Jun 28, 2011
Method of processing a workpiece in a plasma reactor with variable height ground return path to control plasma ion density uniformity
APPLIED MATERIALS INC46 citations94
US7988815B2Aug 2, 2011
Plasma reactor with reduced electrical skew using electrical bypass elements
APPLIED MATERIALS INC11 citations84
US7879731B2Feb 1, 2011
Improving plasma process uniformity across a wafer by apportioning power among plural VHF sources
APPLIED MATERIALS INC13 citations84
US7838430B2Nov 23, 2010
Plasma control using dual cathode frequency mixing
APPLIED MATERIALS INC8 citations83
US7884025B2Feb 8, 2011
Plasma process uniformity across a wafer by apportioning ground return path impedances among plural VHF sources
APPLIED MATERIALS INC4 citations63
COLLINS KENNETH S
2 patentsUS8076247B2Dec 13, 2011
Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes
COLLINS KENNETH S11 citations83
US8080479B2Dec 20, 2011
Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator
COLLINS KENNETH S6 citations73