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Inventor
NAITO YOSHITATSU
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “NAITO YOSHITATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI VIA MECHANICS LTD
2 patents
US7969636B2
Jun 28, 2011
Laser direct imaging apparatus
HITACHI VIA MECHANICS LTD
24 citations
91
US7372478B2
May 13, 2008
Pattern exposure method and pattern exposure apparatus
HITACHI VIA MECHANICS LTD
6 citations
58
HITACHI LTD
1 patent
US6460755B1
Oct 8, 2002
Bump forming method and apparatus therefor
HITACHI LTD
82 citations
94
NAITO YOSHITATSU
1 patent
US8314825B2
Nov 20, 2012
Laser direct imaging apparatus and imaging method
NAITO YOSHITATSU
1 citations
38
OSHIDA YOSHITADA
1 patent
US8089614B2
Jan 3, 2012
Device for changing pitch between light beam axes, and substrate exposure apparatus
OSHIDA YOSHITADA
0 citations
31