Inventor
ICHINO KATSUNORI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ICHINO KATSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS9731226B2Aug 15, 2017
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD3 citations72
US9613836B2Apr 4, 2017
Coating film forming apparatus, coating film forming method, and recording medium
TOKYO ELECTRON LTD6 citations72
US10262880B2Apr 16, 2019
Cover plate for wind mark control in spin coating process
TOKYO ELECTRON LTD4 citations70
US10807027B2Oct 20, 2020
Treatment solution supply apparatus and substrate treatment system
TOKYO ELECTRON LTD1 citations61
US11587805B2Feb 21, 2023
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations56
US10201826B2Feb 12, 2019
Liquid coating method, liquid coating apparatus, and computer-readable storage medium
TOKYO ELECTRON LTD1 citations56
US10022652B2Jul 17, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9878267B2Jan 30, 2018
Solution treatment apparatus and solution treatment method
TOKYO ELECTRON LTD1 citations51
US9165763B2Oct 20, 2015
Coating treatment method
TOKYO ELECTRON LTD0 citations50
US12094737B2Sep 17, 2024
Substrate processing apparatus, control method, and computer-readable storage medium
TOKYO ELECTRON LTD0 citations43