Inventor
TAKAYANAGI KOJI
JP37 patents
⚠️ This page may combine multiple inventors who share the name “TAKAYANAGI KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
24 patentsUSD610176SFeb 16, 2010
Coater cup
TOKYO ELECTRON LTD37 citations90
US9846363B2Dec 19, 2017
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD7 citations83
US11273464B2Mar 15, 2022
Substrate processing apparatus
TOKYO ELECTRON LTD10 citations82
US10838311B2Nov 17, 2020
Coating and developing apparatus and coating and developing method
TOKYO ELECTRON LTD7 citations81
US11342198B2May 24, 2022
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD3 citations72
US10074546B2Sep 11, 2018
Processing liquid supplying apparatus and processing liquid supplying method
TOKYO ELECTRON LTD2 citations72
US9991140B2Jun 5, 2018
Substrate heating device, substrate heating method and computer-readable storage medium
TOKYO ELECTRON LTD3 citations72
US9947534B2Apr 17, 2018
Coating treatment method with airflow control, and non-transitory recording medium having program recorded thereon for executing coating treatment with airflow control
TOKYO ELECTRON LTD2 citations72
US9732910B2Aug 15, 2017
Processing-liquid supply apparatus and processing-liquid supply method
TOKYO ELECTRON LTD3 citations72
US8375887B2Feb 19, 2013
Solution treatment apparatus, solution treatment method and resist coating method
TOKYO ELECTRON LTD5 citations72
US10734251B2Aug 4, 2020
Liquid processing apparatus, liquid processing method, and storage medium for liquid process
TOKYO ELECTRON LTD5 citations71
US11062899B2Jul 13, 2021
Coated film removing apparatus
TOKYO ELECTRON LTD3 citations66
US10256122B2Apr 9, 2019
Substrate heating method
TOKYO ELECTRON LTD1 citations62
US9508574B2Nov 29, 2016
Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium
TOKYO ELECTRON LTD2 citations62
US10974181B2Apr 13, 2021
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations58
US8851011B2Oct 7, 2014
Coating treatment method, coating treatment apparatus, and computer-readable storage medium
TOKYO ELECTRON LTD0 citations52
US10268116B2Apr 23, 2019
Processing liquid supplying apparatus and method of supplying processing liquid
TOKYO ELECTRON LTD0 citations51
US9576829B1Feb 21, 2017
Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium
TOKYO ELECTRON LTD1 citations51
US12257611B2Mar 25, 2025
Cleaning jig, coating apparatus, and cleaning method
TOKYO ELECTRON LTD0 citations50
US11862485B2Jan 2, 2024
Nozzle standby device, liquid processing apparatus and operation method of liquid processing apparatus
TOKYO ELECTRON LTD0 citations50
US9165763B2Oct 20, 2015
Coating treatment method
TOKYO ELECTRON LTD0 citations50
US11868057B2Jan 9, 2024
Solution treatment apparatus and cleaning method
TOKYO ELECTRON LTD0 citations49
US10493387B2Dec 3, 2019
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations48
US12525906B2Jan 13, 2026
Motor control method, transfer device, and storing medium
TOKYO ELECTRON LTD0 citations47
RENESAS ELECTRONICS CORP
8 patentsUS9948283B2Apr 17, 2018
Semiconductor device
RENESAS ELECTRONICS CORP8 citations84
US10062669B2Aug 28, 2018
Semiconductor device
RENESAS ELECTRONICS CORP2 citations73
US9576934B2Feb 21, 2017
Semiconductor device
RENESAS ELECTRONICS CORP2 citations73
US9948090B2Apr 17, 2018
Semiconductor device
RENESAS ELECTRONICS CORP2 citations70
US11088111B2Aug 10, 2021
Semiconductor device
RENESAS ELECTRONICS CORP0 citations62
US10236868B2Mar 19, 2019
Semiconductor device
RENESAS ELECTRONICS CORP1 citations62
US12362743B2Jul 15, 2025
Semiconductor device
RENESAS ELECTRONICS CORP0 citations52
US10396549B2Aug 27, 2019
Semiconductor device
RENESAS ELECTRONICS CORP0 citations49
YOSHIHARA KOUSUKE
3 patentsUS8414972B2Apr 9, 2013
Coating treatment method, coating treatment apparatus, and computer-readable storage medium
YOSHIHARA KOUSUKE5 citations84
US9162247B2Oct 20, 2015
Coating and development treatment system with airflow control including control unit and movable airflow control plate
YOSHIHARA KOUSUKE11 citations83
US8318247B2Nov 27, 2012
Coating treatment method, coating treatment apparatus, and computer-readable storage medium
YOSHIHARA KOUSUKE2 citations62