P

Inventor

KWON GI CHUNG

KR15 patents
⚠️ This page may combine multiple inventors who share the name “KWON GI CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JUSUNG ENG CO LTD

9 patents
US6770836B2Aug 3, 2004

Impedance matching circuit for inductively coupled plasma source

JUSUNG ENG CO LTD25 citations89
US7442273B2Oct 28, 2008

Apparatus using hybrid coupled plasma

JUSUNG ENG CO LTD18 citations82
US6847516B2Jan 25, 2005

Electrostatic chuck for preventing an arc

JUSUNG ENG CO LTD16 citations81
US8035056B2Oct 11, 2011

Plasma generation apparatus

JUSUNG ENG CO LTD6 citations72
US7411148B2Aug 12, 2008

Plasma generation apparatus

JUSUNG ENG CO LTD8 citations72
US6653988B2Nov 25, 2003

Parallel resonance whirl antenna

JUSUNG ENG CO LTD5 citations60
US6768269B2Jul 27, 2004

Plasma process chamber monitoring method and system used therefor

JUSUNG ENG CO LTD0 citations50
US7465672B2Dec 16, 2008

Method of forming etching mask

JUSUNG ENG CO LTD0 citations47
US6685800B2Feb 3, 2004

Apparatus for generating inductively coupled plasma

JUSUNG ENG CO LTD0 citations37

UNIV KWANGWOON IND ACAD COLLAB

2 patents
US10964515B2Mar 30, 2021

Plasma diagnostic system and method

UNIV KWANGWOON IND ACAD COLLAB1 citations56
US12315710B2May 27, 2025

Plasma diagnosis system and plasma diagnosis method

UNIV KWANGWOON IND ACAD COLLAB0 citations37

JUNSUNG ENGINEERING CO LTD

1 patent
US6683274B1Jan 27, 2004

Wafer susceptor

JUNSUNG ENGINEERING CO LTD341 citations93

HONG JIN

1 patent
US8674209B2Mar 18, 2014

Thin film type solar cell and method for manufacturing the same

HONG JIN3 citations54

TERATECH CO LTD

1 patent
US9162179B2Oct 20, 2015

Apparatus for decomposing perfluorocarbon and harmful gas using high-density confined plasma source

TERATECH CO LTD0 citations45

KWON GI-CHUNG

1 patent
US8460469B2Jun 11, 2013

Apparatus for etching substrate and method of etching substrate using the same

KWON GI-CHUNG0 citations33